Piezoelectric Actuators
- Multilayer Actuators
By combining
our superior piezoelectric materials expertise and our
globally-recognized multilayer production techniques we are able
to offer a range of high efficiency low voltage multilayer
actuators to meet the growing demand for precise, controllable and
repeatable displacement devices in the micrometer and
sub-micrometer range.
Multilayer piezoelectric ceramic actuators are devices capable of
rapid (<10 µs) micrometer movements with nanometer precision.
They utilise the inverse piezoelectric effect, in which an
electric field creates a length change perpendicular to this
field.
Multilayer
Actuators: d31 type
By making the ceramic layers very thin, displacements can be
generated with low power consumption at operating voltages down to
60V. With an electrical field of <3kV/mm large
displacements per unit volume can be achieved with high
reliability.
We offer
layer thickness between 20 µm and 100µm as well as design
flexibility in order to suit customers’ requirements.
Typical
applications are: inkjet printing, micro-positioning.
Maximum
Values
|
Unit |
Min. |
Max. |
| Length |
mm |
1 |
75 |
| Width |
mm |
1 |
20 |
| Height |
mm |
0.2 |
2 |
| Dielectric Thickness |
µ m |
20 |
100 |
| Operating Voltage |
V |
3 |
300 |
| Displacement |
µ m |
-1.4 |
-48 |
| Blocking Force |
N |
25 |
800 |
| Termination |
evaporated Cr, Ni, Au |
Material
Properties
| Property |
Unit |
PZT506 |
| Curie Temperature |
° C |
300 |
| Density |
x103kg/m3 |
8.0 |
| Frequency Constant |
Hz/m |
1940 |
| Dielectric Constant |
- |
2550 |
| Dielectric Loss Factor |
x10-3 |
65 |
| Coupling Factor |
- |
0.72 |
| Charge Constant d31 |
x10-12m/V |
-255 |
| Resistivity |
GΩm*m |
> 40 |
| Stability (85ºC, Vd = 3V/um) |
h |
> 5000 |
Multilayer
Actuators: d33 type
By making the ceramic layers very thin and then combining them in
such a way as to produce tall stacks, displacements can be
generated with low power consumption at operating voltages from
60V to 300V. With an electrical field of <3kV/mm large
displacements per unit volume can be achieved with high
reliability.
We offer
layer thickness between 20 µm and 100µm as well as design
flexibility in order to suit customers’ requirements. We also
offer coatings and end caps, so actuators are supplied ready for
use in a variety of operating conditions.
Typical
applications are: micro-positioning, high output sensors, printing
heads
Standard
sizes available are (LxWxH) 3x3x2, 5x5x2, 7x7x2, 10x10x2, 12x12x2 mm
Maximum
Values
| CHIPS |
Unit |
Min. |
Max. |
| Length |
mm |
1 |
75 |
| Width |
mm |
1 |
12 |
| Height |
mm |
0.2 |
2.0 |
| Dielectric Thickness |
µ m |
20 |
100 |
| Operating Voltage |
V |
60 |
300 |
| Displacement |
µ m |
0.5 |
3.5 |
| Blocking Force |
N |
0.6 |
>4000 |
| Termination (1) |
evaporated Cr, Ni, Au |
| Termination (2) |
fired-on Silver |
| Termination (3) |
leads |
Material
Properties
| Property |
Unit |
PZT506 |
| Curie Temperature |
° C |
300 |
| Density |
x103kg/m3 |
8.0 |
| Frequency Constant |
Hz/m |
1940 |
| Dielectric Constant |
- |
2550 |
| Dielectric Loss Factor |
x10-3 |
65 |
| Coupling Factor |
- |
0.72 |
| Charge Constant d31 |
x10-12m/V |
550 |
| Resistivity |
GΩm*m |
> 40 |
| Stability (85ºC, Vd = 3V/um) |
h |
> 5000 |
Multilayer
Benders
We are able
to offer a range of high efficiency low voltage multilayer benders
to meet the growing demand for precise, controllable and
repeatable deflection devices in the millimeter and micrometer
range.
Multilayer
piezoelectric ceramic benders are devices capable of rapid (<10
ms) millimetre movements with micrometer precision. They utilise
the inverse piezoelectric effect, in which an electric field
creates a cantilever bending effect. By making the ceramic layers
very thin deflections can be generated with low power consumption
at operating voltages from -10V to +120V. With an electrical field
of <3kV/mm large deflections per unit volume can be achieved
with high reliability.
We offer a
layer thickness between 20 µm and 40µm as well as design
flexibility in order to suit customers’ requirements
Note: A single bender cannot combine maximum deflection and
maximum blocking force!
Typical
applications: proportional valves, low-energy consuming switches
or pumps
Maximum
Values
|
Unit |
Min. |
Max. |
| Length |
mm |
9 |
65 |
| Width |
mm |
4 |
12 |
| Height |
mm |
0.4 |
1.5 |
| Dielectric Thickness |
µ m |
20 |
40 |
| Operating Voltage |
V |
-10 |
120 |
| Deflection |
µ m |
30 |
± 2500 |
| Blocking Force |
N |
0.3 |
20 |
| Clamping Length |
mm |
3.5 |
|
| Termination |
evaporated Cr, Ni, Au |
Material
Properties
| Property |
Unit |
PZT506 |
| Curie Temperature |
° C |
300 |
| Density |
x103kg/m3 |
8.0 |
| Frequency Constant |
Hz/m |
1940 |
| Dielectric Constant |
- |
2550 |
| Dielectric Loss Factor |
x10-3 |
65 |
| Coupling Factor |
- |
0.72 |
| Charge Constant d31 |
x10-12m/V |
-255 |
| Resistivity |
GΩm*m |
> 40 |
| Stability (85ºC, Vd = 3V/um) |
h |
> 5000 |
Applications | Microwave Products
| Piezoelectric Products | Capacitors
| Transducer & Sensor
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